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Breakdown Maintenance

Guidelines.

10. Share to the team.

09. Create countermeasures-->SOP/OPLS/HOWTO-->Upload to KnowledgeBase Site

08. Write an FAR-->Upload to Incidents Site

07. Fix the problem

06. Create a BM Cycle Chart-->Upload to Incidents Site

05. Document every task

04. Recover the wafer safely.

03. Define the problem.

02. Start Timer (Sharepoint-->Incidents Tab-->Template

01. Get BM Report Notebook

Resources

BM Report (Sharepoint-->Incidents Tab)

FAR (Sharepoint-->Incidents Tab)

HOWTO (Sharepoint-->KnowledgeBase Tab)

OPLS(Sharepoint-->KnowledgeBase Tab)

SOP (Sharepoint-->KnowledgeBase Tab)

ECard (Sharepoint-->KnowledgeBase Tab)

Sensor Cards (Sharepoint-->KnowledgeBase Tab)

Schematics (Sharepoint-->Equipment Tab)

gCMP Search (Sharepoint-->Search Bar)

LK VSPI (In \\mycmp computer)

Ebara BOM (Sharepoint-->Home Right Pane Links)

Rules of Recovery (Sharepoint-->Home Tab-->Rules)